Zirconia Pressure Sensors: From Nanopowders to Device
نویسندگان
چکیده
منابع مشابه
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The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explaine...
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ژورنال
عنوان ژورنال: Solid State Phenomena
سال: 2004
ISSN: 1662-9779
DOI: 10.4028/www.scientific.net/ssp.99-100.89